A Study of Structural Design for Enhancing Surface Temperature Uniformity of Aluminum Heaters Used in Plasma-Enhanced Chemical Vapor Deposition Processes
Year: 2025
Type: article
Authors: Korean Industrial Technology Convergence Society, Hyun-Chul Wang, Kyoung-Ho Kim
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4412382585