Work

Mechanistic insights into the synergistic effect of oxidizers and abrasives in chemical mechanical polishing of 4H-SiC wafer

Year: 2025

Type: article

Source: Ceramics International

DOI: 10.1016/j.ceramint.2025.07.097

Authors: Xin Song, Jiani Guo, Changyang Xu, Zhigang Dong, Renke Kang, Shang Gao

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China, National Key Research and Development Program of China Stem Cell and Translational Research

Awards: G39649563, G4509183833, G6797325683, G8227014830

OpenAlex ID: W4412428354

FWCI: 4.653

Cites: 40

Cited by: 19

Related to: 10