Work

Ion Composition of Plasma of a Planar Magnetron in the Gaseous and Vacuum Modes of Operation

Year: 2025

Type: article

Source: Plasma Physics Reports

DOI: 10.1134/s1063780x25602524

Authors: D. B. Zolotukhin, M. V. Shandrikov, G. Yu. Yushkov

Institutions: Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412481264

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Cites: 22

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Related to: 10