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Atomic Force Microscopy Study of the Physical Properties of Aluminum Nitride Thin Films

Year: 2025

Type: article

Source: Technical Physics Letters

DOI: 10.1134/s1063785025700129

Authors: V. I. Strunin, L. V. Baranova, N. A. Davletkil’deev, A. Yu. Kuklev, N. A. Chirikov

Institutions: Russian Academy of Sciences, Omsk State University, Siberian Branch of the Russian Academy of Sciences

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412499587

FWCI:

Cites: 6

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Related to: 10