Work

Direct intermittent Monitoring in the DUV range

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.tc.4

Authors: D. Arhilger, H. Hagedorn, A. Zöller

Institution: Bühler (Germany)

Language: English

Topic: Calibration and Measurement Techniques

Subfield: Aerospace Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566601

FWCI:

Cites: 2

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Related to: 10