Work

High Speed Atomic Layer Deposition of Broadband Antireflection Coatings based on Nanoporous Alumina

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.thc.3

Authors: Jani Holopainen, Abhishekkumar Thakur, Adriana Szeghalmi, Stephan Mingels, Harro Hagedorn

Institutions: Bühler (Germany), Fraunhofer Institute for Applied Optics and Precision Engineering

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566619

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