Work

Submicrometer Defect Detection and Classification by Angle Resolved Light Scattering

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.we.9

Authors: S. Schröder, A.-S. Munser, S. Ma, T. Herffurth, Th. Gischkat, Ch. Mühlig, A. Tünnermann

Institutions: Fraunhofer Institute for Applied Optics and Precision Engineering, Friedrich Schiller University Jena

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566684

FWCI:

Cites: 7

Cited by:

Related to: 10