Phase-shift interferometer measurement of anisotropic stress in wide bandgap Zirconium oxide thin films
Year: 2025
Type: conference-paper
Authors: Hong-Jie Lin, Hsi-Chao Chen, Yu-Wei Chang, Kun-Hong Chen, Guan-Yi Su, Zheng-Zhan Hong, Tan-Jung Li
Institution: National Yunlin University of Science and Technology
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4412566693