Characterization and comparison of thin film stress for a variety of oxide materials, chambers, and deposition techniques
Year: 2025
Type: conference-paper
Authors: Michael Middleton, Ian Stevenson, Nick Smith, Chris Infante, Olivia Wheeler-Williams, Mathias Mende, David Ahlstrand, Nathan Carlie
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4412566712