Work

Spatial atomic layer deposition: a new revolution in ultra-fast production of conformal optical interference coatings

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.thc.5

Authors: John Rönn, Sauli Virtanen, Emmanuele Sortino, Philipp Maydannik, Sami Sneck

Institution: Beneq (Finland)

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566731

FWCI:

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Related to: 10