Work

Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.we.8

Authors: Adrien Bolliand, Michel Lequime, Claude Amra, Myriam Zerrad

Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, Institut Fresnel, Centrale Méditerranée

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566743

FWCI:

Cites: 5

Cited by:

Related to: 10