Work

Ion Beam Sputtering for Substrate Deposition with a Size of 2m: Simulation and Optimization

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.mc.5

Authors: Holger Badorreck, Tarik Kellermann, Dennis Barton, Morten Steinecke, Marco Jupé, Detlev Ristau, Andreas Wienke

Institutions: Laser Zentrum Hannover, Fraunhofer Institute for Surface Engineering and Thin Films, Leibniz University Hannover

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566769

FWCI:

Cites: 6

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Related to: 10