Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection
Year: 2025
Type: conference-paper
Abstract: Gravitational wave detectors rely on low mechanical and optical loss mirror coatings. This work discusses optical losses through absorption and light scattering mechanisms in SiNx and SiOxNy coatings deposited by plasma-enhanced chemical vapour deposition.
Authors: Kirstin Saunders, Tobias Herfurth, Simon Bublitz, Christian Mühlig, Anne-Sophie Munser, Des Gibson, Caspar Clark, Carlos García Nuñez, Sven Schröder
Language: English
Subfield: Astronomy and Astrophysics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4412566779
