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Nano-Imprint Lithography of Metal-Oxides: Materials and Nano-Fabrication Methods for Photonic Meta-surfaces

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.td.2

Authors: Antony Gourdin, Eias Daher, Badre Kerzabi, David Grosso, Mohammed Bouabdellaoui, Nicoletta Granchi, Laurent Gallais, Marco Abbarchi

Institutions: Centre National de la Recherche Scientifique, Université de Toulon, Aix-Marseille Université, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence, Institut Fresnel, Centrale Méditerranée, Centre Interdisciplinaire de Nanoscience de Marseille, European Laboratory for Non-Linear Spectroscopy, University of Florence

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566804

FWCI:

Cites: 7

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Related to: 10