Influence of Oxygen Flow and Sub-Stoichiometry on the Optical and Damage Resistance Properties of Hafnium Oxide Thin Films
Year: 2025
Type: conference-paper
Abstract: This study examines how oxygen flow during hafnia coating deposition by ion beam sputtering affects optical properties, film composition, and laser damage performance under ns laser exposure.
Institution: Lawrence Livermore National Laboratory
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: gold
OpenAlex ID: W4412566833
