Work

Influence of Oxygen Flow and Sub-Stoichiometry on the Optical and Damage Resistance Properties of Hafnium Oxide Thin Films

Year: 2025
Type: conference-paper
Abstract: This study examines how oxygen flow during hafnia coating deposition by ion beam sputtering affects optical properties, film composition, and laser damage performance under ns laser exposure.
Language: English
Open Access status: gold
OpenAlex ID: W4412566833
FWCI: 8.803
Cites: 4
Cited by: 1
Related to: 10