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Study Of Deposition Parameters Of Silicon Oxide And Silicon Nitride Thin Films Synthesized By Pulsed-Direct Current Reactive Magnetron Sputtering

Year: 2025

Type: conference-paper

DOI: 10.1364/oic.2025.fb.6

Authors: L. Cruz Gabarain, N. Abundiz Cisneros, R. Sanginés de Castro, E. Terán Hinojosa, R. Machorro Mejía

Institutions: Centro de Investigación Científica y de Educación Superior de Ensenada, Secretaría de Ciencia, Humanidades, Tecnología e Innovación, Universidad Nacional Autónoma de México

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412566852

FWCI:

Cites: 3

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Related to: 10