Work

The Photopolymer Science and Technology Award

Year: 2025

Type: article

Abstract: The Photopolymer Science and Technology Award No. 251100, the Outstanding Achievement Award 2025, has been presented to Dr. Jos Benschop (ASML) in recognition of his remarkable contributions to the field of photopolymer science and technology, particularly for "bringing EUV Lithography from the research phase to high-volume manufacturing.".

Source: Journal of Photopolymer Science and Technology

DOI: 10.2494/photopolymer.38.1

Author: Jos Benschop

Institution: ASML (Netherlands)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W4412661696

FWCI:

Cites: 9

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Related to: 10