Work

Design of XYR Precision Positioning Platform Control System for Desktop Scanning Electron Microscope

Year: 2025

Type: conference-paper

Source: International Conference on Electronics, Circuits and Information Engineering (ECIE)

DOI: 10.1109/ecie65947.2025.11087054

Authors: Hui Zhang, Yong Zhao, Yang Zhang

Institution: Hefei University of Technology

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412720889

FWCI: 2.418

Cites:

Cited by: 1

Related to: 10