Work

Backside-Supported Electrothermal Actuation for 25,000 g-Survivable Optical Switches

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3591299

Authors: Jin Xie, Tao He, Zheng Lian, Xiao Zhang, Yongcun Hao, Honglong Chang, Zhuang Xiong, Jun Cao, Hao Zhang, Chao Zeng, Yizhuang Zhao, Jun Dai

Institutions: China Academy of Engineering Physics, Beijing Institute of Technology, Northwestern Polytechnical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G4700646178, G8760029614

OpenAlex ID: W4412802194

FWCI:

Cites:

Cited by:

Related to: 10