Work

BEOL-Compatible Microwave Annealing of HfO2/ZrO2 Superlattice Super High-K: Stabilizing Morphotropic Phase Boundaries and Low Leakage Current

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097241

Authors: Chen-You Wei, Yu-Hong Chen, Yi-Ju Yao, Guang-Li Luo, Fu-Ju Hou, Yung-Chun Wu

Institutions: National Tsing Hua University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412803201

FWCI: 2.358

Cites: 2

Cited by: 1

Related to: 10