Work

Integration of Optimized Superlattice HfO2/ZrO2 Dielectric into High-Performance Superlattice SiGe/Si p-Type GAAFETs

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097212

Authors: Kai-Ting Huang, Yi-Ju Yao, Heng-Jia Chang, Chen-You Wei, Yu-Min Fu, Bo-Xu Chen, Tsai-Jung Lin, Yung-Teng Fang, Guang-Li Luo, Fu-Ju Hou, Yung-Chun Wu

Institutions: National Tsing Hua University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412803223

FWCI:

Cites: 1

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Related to: 10