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Poly-Si Nanosheet FETs with Vertical C-Shaped Channel Using Pulse Laser Crystallization

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097229

Authors: Jinbiao Liu, Zhuo Chen, Yongkui Zhang, Junfeng Li, Xianglie Sun, Shujuan Mao, Guilei Wang, Chao Zhao, Huilong Zhu, Jun Luo

Institutions: Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412803268

FWCI:

Cites: 1

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