Work

O/H Supercritical Fluid Passivation on Stacked Ge0.95Si0.05 Nanosheet nFETs

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097221

Authors: Min-Kuan Lin, Ding-Wei Lin, Jui-Yu Hsu, Guan-Hua Chen, Bo-Hui Yu, Wei-Jen Chen, Bo-Wei Huang, Tao Chou, Yi-Chun Liu, Yu-Rui Chen, Hong-Yi Tu, Ting-Chang Chang, C. W. Liu

Institutions: National Taiwan University, National Sun Yat-sen University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W4412803442

FWCI:

Cites: 4

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Related to: 10