Work

High-Performance BEOL-Compatible ALD-IGZO Top-Gate Radio-Frequency Transistors

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097207

Authors: Yanqing Wu, Shenwu Zhu, Qianlan Hu, Anyu Tong

Institution: Peking University

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G5219546381

OpenAlex ID: W4412803448

FWCI:

Cites: 6

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Related to: 10