Work

BEOL-Compatible GAAFET Hybrid Memory Based on HfO2/ZrO2Superlattice with Morphotropic Phase Boundary

Year: 2025

Type: conference-paper

Source: Silicon Nanoelectronics Workshop (SNW)

DOI: 10.23919/snw65111.2025.11097220

Authors: Kuei-Chun Liao, Chen-You Wei, Yi-Ju Yao, Cheng-En Wu, Chien-Lung Chen, Chih-Chao Yang, Guang-Li Luo, Fu-Ju Hou, Yung-Chun Wu

Institutions: National Tsing Hua University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412803542

FWCI:

Cites: 1

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Related to: 10