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A cantilever beam-based optomechanical inertial sensor in silicon nitride photonics platform

Year: 2025

Type: conference-abstract

Source: The Journal of the Acoustical Society of America

DOI: 10.1121/10.0037711

Authors: Yuqi Meng, Xiaoyu Niu, Ehsan Vatankhah, Zihuan Liu, Neal A. Hall

Institution: The University of Texas at Austin

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412871219

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