1.1-cm-long thin-film lithium niobate Mach-Zehnder modulator with low driving voltage integrated by micro-transfer printing
Year: 2025
Type: article
Abstract: The heterogeneous integration of thin-film lithium niobate (TFLN) provides energy-efficient broadband optical modulation of photonic platforms. Micro-transfer printing (µ-TP) yields dense integration of heterogeneous materials and cost-effective photonic integrated circuits. However, the reports so far have considered unpatterned slab membranes for the structure of the µ-TP integrated TFLN, and the short interaction length increases the driving voltage. In this study, the µ-TP of pre-structure-defined TFLN Mach-Zehender (MZ) interferometer was demonstrated for up to 1.1 cm with propagation loss of 0.7 dB/cm. The TFLN MZ modulator integrated on a silicon substrate using µ-TP exhibited the lowest driving voltage V π of 2.7 V and a modulation bandwidth of 28 GHz with a low insertion loss of 0.97 dB. In addition, modulation frequencies exceeding 50 GHz and V π of 8.9 V were demonstrated in a device with 3-mm-long electrodes.
Source: Optics Express
DOI: 10.1364/oe.568498
Authors: Toshiya Murai, Rai Kou, Guangwei Cong, Masahiko Imai, Kazumasa Takabayashi, Koji Yamada
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
Award: G5545880328
OpenAlex ID: W4412914814
