First Demonstration of Atomic-Interlayer-Tuning Driven by First Principles Calculations and Atomic Layer Deposition Towards High Thermal Stable BEOL IGZO-FETs with SS=62mV/dec, PBTI < 7mV@ 3MV/cm and 353K
Year: 2025
Type: conference-paper
Authors: Xufan Li, Chen Gu, Tong Yu, Yue Zhao, Chuanke Chen, Chunyu Zhang, Ziheng Bai, Xinlv Duan, Weiwei Li, Tianhao Liao, Shundong Hu, Nannan You, Jiayi Wang, Rui Chen, Zhicheng Wu, Nianduan Lu, Jiawei Wang, Guanhua Yang, Lingfei Wang, Di Geng, Ling Li, Ming Liu
Institution: Institute of Microelectronics
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G754783375, G8606397282
OpenAlex ID: W4412963263