Work

BEOL-Compatible ITO FET with Ultra-Short Channel Length of 5 nm

Year: 2025

Type: conference-paper

DOI: 10.23919/vlsitechnologyandcir65189.2025.11074860

Authors: Yuxuan Wang, Jiawei Xie, Zhilun Zhang, Zuopu Zhou, Dong Zhang, Chen Sun, Kaizhen Han, Zijie Zheng, Wei Shi, Yuye Kang, Xuanqi Chen, Gerui Zheng, Rui Shao, Xiao Gong

Institution: National University of Singapore

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412963347

FWCI: 18.87

Cites: 3

Cited by: 8

Related to: 10