Shifter Materials and Stack Explorations for $V_{t}$ Fine-Tunable Dual Dipole Multi-$V_{t}$ Gate Stacks Compatible with Low Thermal Budget CFET
Year: 2025
Type: conference-paper
Authors: H. Arimura, L. Lukose, J. Ganguly, J. Franco, H. Mertens, J. Stiers, J. G. Lai, A. Mehta, M. Bejide, M. S. Kim, N. Horiguchi
Institution: IMEC
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G7795100286
OpenAlex ID: W4412963358