A $22 \mu \mathrm{g} /\sqrt{} \text{Hz}$ Noise Floor, $1.6 \text{mg} /\mathrm{g}^{2}$ VRC, High Efficiency MEMS Capacitive Accelerometer Using High-Voltage Orthogonal Excitation Technique
Year: 2025
Type: conference-paper
Authors: Wenfei Cao, Longjie Zhong, Wenxiu Jian, Ling Wang, Zhangming Zhu
Institution: Xidian University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G4486360199
OpenAlex ID: W4412963654