Work

High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation

Year: 2025

Type: conference-paper

DOI: 10.23919/vlsitechnologyandcir65189.2025.11075072

Authors: Jongyoun Park, Heejae Jeong, Euyjin Park, Geuntae Park, Chung-hyun Ahn, Sangsu Lee, Jiwoo Won, Hyuk-Jun Kwon, Hyun-Yong Yu

Institutions: Korea University, Daegu Gyeongbuk Institute of Science and Technology

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Research Foundation of Korea

Award: G4199717106

OpenAlex ID: W4412963782

FWCI: 7.075

Cites: 10

Cited by: 3

Related to: 10