Backside Routing Enablement Considerations for Advanced Node GAA Devices
Year: 2025
Type: conference-paper
Authors: Kumar Subramani, Rwik Sengupta, Matthew Loden, Ardasheir Rahman, Dan Dechene, Albert Chu
Institutions: Cadence Design Systems (United States), IBM (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4412964373
