First Demonstration of 2-floor GAA In2O3 Nanosheet FET Enabled by TiN Sacrificial Layers and Fluorine Passivation
Year: 2025
Type: conference-paper
Authors: Yu-Shan Wu, Yuan-Ming Liu, Hsien-Ming Sung, Rong-Wei Ma, Johannes Gracia, Hidenari Fujiwara, Kuan-Wei Lu, C. W. Liu
Institution: National Taiwan University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6668827252
OpenAlex ID: W4412964617