Monolithic CFET Flow Improvements Integrating Cover Spacer and Dual-WF RMG
Year: 2025
Type: conference-paper
Authors: C. Cavalcante, S. Demuynck, C. Sheng, D. Batuk, M. Hosseini, A. Peng, K. Stiers, A. Vandooren, H. Mertens, T. Chiarella, H. Arimura, J. Mitard, V. Georgieva, H. Puliyalil, A. Sepulveda Marquez, M. Chistiakova, A. Peter, Y. Kimura, F. Sebaai, P. Puttarame Gowda, J. G. Lai, A. Arslanova, N. Reddy, A. Mingardi, S. Kumar Sarkar, R. Kumar Saroj, S. Choudhury, D. Alvarez, T. Sarkar, I. Gyo Koo, E. Altamirano Sanchez, S. Subramanian, L. P. B. Lima, N. Horiguchi, S. Biesemans
Institution: IMEC
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4412965662