Work

First Demonstration of BEOL-Compatible ALD-Deposited 2 nm-Thick Indium-Tungsten-Tin-Oxide (IWTO) TFTs with Superior Short-Channel Electrical Characteristics: Achieving Enhancement-Mode $\mathrm{V}_{\text{TH }}, \mathrm{I}_{\text{ON } / \text{OFF }}>10^{{10}}$, SS ~ 63.3 mV/dec