Work

First Demonstration of BEOL-Compatible Co-Sputter Deposited $\text{Te}_{1-x} \text{Se}_{x}$ p-FETs Enabling 3D Stackable Oxide Semiconductor CFET, DRAM, and First CFET-Structured SRAM

Year: 2025

Type: conference-paper

DOI: 10.23919/vlsitechnologyandcir65189.2025.11075219

Authors: Ying Xu, Yiyuan Sun, Zuopu Zhou, Zijie Zheng, Sheng Luo, Chen Sun, Yuye Kang, Kai Ni, Gengchiau Liang, Xiao Gong

Institutions: National University of Singapore, University of Notre Dame, National Yang Ming Chiao Tung University

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: CAREER: High-Performance Ferroelectric Memory for In-Memory Computing

OpenAlex ID: W4412966516

FWCI: 16.51

Cites: 3

Cited by: 7

Related to: 10