Work

Plasma Chemical Synthesis and Morphological Study of IGZO Thin Films

Year: 2025

Type: article

Source: High Energy Chemistry

DOI: 10.1134/s0018143925700171

Authors: L. A. Mochalov, S. V. Telegin, E. A. Slapovskaya, A. V. Knyazev

Institutions: Nizhny Novgorod State Technical University, N. I. Lobachevsky State University of Nizhny Novgorod

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413000494

FWCI:

Cites: 32

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Related to: 10