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Spectral Reflectometry-Based Film Thickness Measurement Using Particle Swarm Optimization

Year: 2025

Type: conference-paper

DOI: 10.1109/eicct65471.2025.11099948

Authors: Jingwen Li, Siyao Wang, Jiao Bai, Xiaohao Wang, Xinghui Li

Institutions: Tsinghua Shenzhen International Graduate School, Tsinghua University, China Academy of Engineering Physics

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G8975523231

OpenAlex ID: W4413018696

FWCI:

Cites: 27

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Related to: 10