Work

Investigation of Deposition Rates in Bilayer Silicon Nitride Structures Using Ellipsometry and the Maxwell Garnett Model

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739724600973

Authors: Abdelaziz Beddiaf, Malika Medjaldi, Abderrahim Lanani, Djemouai Djamai

Institutions: University Frères Mentouri Constantine 1, Abbès Laghrour University of Khenchela

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413022899

FWCI:

Cites: 18

Cited by:

Related to: 10