Work

Precise Etching of Aluminum Conductors in the Technology of Switching Devices of Microsystem Engineering

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s1063739725600323

Authors: P. I. Didyk, A. A. Zhukov

Institution: Moscow Aviation Institute

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413022911

FWCI:

Cites: 16

Cited by:

Related to: 10