Work

Measuring the Adhesion Energy between MEMS Structures Using an Adhered Cantilever

Year: 2025

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s106373972560027x

Authors: I. V. Uvarov, O. V. Morozov, A. V. Postnikov, V. B. Svetovoy

Institutions: Russian Academy of Sciences, Kurchatov Institute, Frumkin Institute of Physical Chemistry and Electrochemistry Russian Academy of Sciences

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413022991

FWCI: 0.23

Cites: 32

Cited by: 1

Related to: 10