Effect of Boundary Roughness on the Variability of the VAC of Silicon Field-Effect GAA Nanotransistors
Year: 2025
Type: article
Source: Russian Microelectronics
Author: N. V. Masalskii
Institution: Kurchatov Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413023054
