Year: 2025
Type: article
Abstract: experimentation, we accelerate process discovery and establish CSS flux and substrate temperature as key parameters governing nanostructural formation. Our CSS methodology enables the synthesis of W (sub)oxide structures within process times of less than 10 minutes, a significant improvement over the hour-long durations typically required in conventional hot-wall furnace systems. We elucidate how nanostructural control in the CSS approach arises from the kinetic interplay between the tungsten oxide sublimation flux and the rate of oxygen depletion in the deposited layers, thereby facilitating the formation of distinct W suboxide templates with varied structural motifs. These findings highlight CSS as a highly promising alternative to conventional powder-furnace chemical vapour deposition, offering superior efficiency, precise structural control, scalability, and adaptable process designs tailored to applications spanning photo-/electro-catalysis, photovoltaics, sensors, and highly integrated optoelectronic devices.
Source: Nanoscale
DOI: 10.1039/d5nr01458a
Institutions: University of Cambridge, TU Wien
Language: English
Subfield: Polymers and Plastics
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Awards: EPSRC Centre for Doctoral Training in Integrated Functional Nano (i4Nano), Expanding the Environmental Frontiers of Operando Metrology for Advanced Device Materials Development, Integration of Novel Materials in Spintronic Devices, G5085048528, EPSRC Centre for Doctoral Training in Sustainable and Functional Nano
OpenAlex ID: W4413026917