A Kinematically Decoupled 6-Degree-of-Freedom Nanopositioning Stage With Minimized Crosstalk Based on Flexure Hinges
Year: 2025
Type: article
DOI: 10.1115/1.4069200
Authors: Qianjun Zhang, Hui Dong, Zhicheng Zhang, Xinyu Cai, Yongzhuo Gao, Wei Dong
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6317206018
OpenAlex ID: W4413056658
