Work

Decoupled etch selectivity and optical transparency in controlled deposition of diamond-like carbon films via a reverse antenna PECVD for hard masks

Year: 2025

Type: article

Source: Science China Chemistry

DOI: 10.1007/s11426-025-2746-y

Authors: Chujun Wang, Gong Zhang, Yixian Wang, Xianhaoyan Chen, Qingfeng Chang, Tuo Wang, Jinlong Gong

Institutions: Tianjin University, Collaborative Innovation Center of Chemical Science and Engineering Tianjin, National University of Singapore, Tianjin Normal University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413074346

FWCI: 0.829

Cites: 47

Cited by: 4

Related to: 10