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Chromatic confocal microscopy with galvanometer scanning and CNN-based deconvolution for precise full-field surface profilometry

Year: 2025

Type: conference-abstract

Source: Optical Technology and Measurement for Industrial Applications Conference (OPTM)

DOI: 10.1117/12.3073599

Authors: Wei-Chi Hung, Ching-Chia Yen, Han-Ju Tsai, Feng-Tse Chan, Liang-Chia Chen

Institution: National Taiwan University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413105368

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