Work

Reducing the self-sputtering threshold of a gasless (vacuum) magnetron in DC mode

Year: 2025

Type: article

Abstract: We have explored the operation of a planar magnetron sputtering system operating in gasless (vacuum) DC mode and have found that the threshold value of discharge current can be reduced by a factor of 1.2–1.5 to achieve stable self-sputtering. This reduction of threshold current was achieved using three approaches – reducing the racetrack diameter while maintaining a constant linear current density (discharge current value per racetrack length, A/cm), increasing the discharge voltage by reducing the magnetic field, and adding material with higher sputtering yield to the magnetron sputtering target.

Source: Vacuum

DOI: 10.1016/j.vacuum.2025.114656

Authors: M.V. Shandrikov, A.A. Cherkasov, E.M. Oks, D.B. Zolotukhin

Institutions: Siberian Branch of the Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $2,860

Funder: Russian Science Foundation