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A 36 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR

Year: 2025

Type: conference-paper

Source: IEEE MTT-S International Microwave Symposium digest

DOI: 10.1109/ims40360.2025.11103989

Authors: Wenhao Peng, Suhyun Nam, Ding Wang, Zetian Mi, Amir Mortazawi

Institution: University of Michigan

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Michigan Sea Grant, University of Michigan

OpenAlex ID: W4413122592

FWCI:

Cites: 20

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Related to: 10