Deploying Edge LLMs for Wafer Defect Detection in Chip Manufacturing
Year: 2025
Type: conference-paper
Authors: Xiaolei Zhou, Yuanjie Zhang, Songyu Sun, Chenyi Wen, Zheyu Yan
Institution: Zhejiang University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413122599